发明名称 |
Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same |
摘要 |
An objective having a plurality of optical elements arranged to image a pattern from an object field to an image field at an image-side numerical aperture NA>0.8 with electromagnetic radiation from a wavelength band around a wavelength λ includes a number N of dioptric optical elements, each dioptric optical element i made from a transparent material having a normalized optical dispersion &Dgr;ni=ni(λ0)−ni(λ0+1 pm) for a wavelength variation of 1 pm from a wavelength λ0. The objective satisfies the relation  ∑ i = 1 N ⁢ &Dgr; ⁢ ⁢ n i ⁡ ( s i - d i )  λ 0 ⁢ NA 4 ≤ A for any ray of an axial ray bundle originating from a field point on an optical axis in the object field, where si is a geometrical path length of a ray in an ith dioptric optical element having axial thickness di and the sum extends on all dioptric optical elements of the objective. Where A=0.2 or below, spherochromatism is sufficiently corrected.
|
申请公布号 |
US8345350(B2) |
申请公布日期 |
2013.01.01 |
申请号 |
US20090621239 |
申请日期 |
2009.11.18 |
申请人 |
CARL ZEISS SMT GMBH;EPPLE ALEXANDER;FELDMANN HEIKO;ROSTALSKI HANS-JUERGEN |
发明人 |
EPPLE ALEXANDER;FELDMANN HEIKO;ROSTALSKI HANS-JUERGEN |
分类号 |
G02B17/00 |
主分类号 |
G02B17/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|