发明名称 |
Optical system for use in stage control |
摘要 |
Imprint lithography benefits from precise alignment between a template and a substrate during imprinting. A moiré signal resulting from indicia on the template and the substrate are acquired by a system comprising a line-scan camera and a digital micromirror device (DMD) which provides a high bandwidth, low-latency signal. Once acquired, the moiré signal may be used directly to align the template and the substrate without need for discrete position/angle encoders.
|
申请公布号 |
US8345242(B2) |
申请公布日期 |
2013.01.01 |
申请号 |
US20090580324 |
申请日期 |
2009.10.16 |
申请人 |
MOLECULAR IMPRINTS, INC.;SCHUMAKER PHILIP D.;MOKABERI BABAK |
发明人 |
SCHUMAKER PHILIP D.;MOKABERI BABAK |
分类号 |
G01B11/00;B29C45/76;B41F1/34;G01B15/00;G01N21/86;G01V8/00 |
主分类号 |
G01B11/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|