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发明名称
Exposure apparatus
摘要
申请公布号
US8345244(B2)
申请公布日期
2013.01.01
申请号
US12582979
申请日期
2009.10.21
申请人
发明人
分类号
G01B0011/000000;G01N0021/000086;G03B0027/000032;G03F0009/000000
主分类号
G01B0011/000000
代理机构
代理人
主权项
地址
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