| 摘要 |
The present invention relates generally to microphone devices useful, for example, in hearing aid devices. The present invention relates more particularly to tunable microphone devices, and methods used to tune them. One aspect of the present invention is a microphone device that includes at least one microphone element. Each microphone element comprises a diaphragm suspended by a substrate; a solid electrolyte disposed on the diaphragm; an anode electrically coupled to the solid electrolyte; and a cathode electrically coupled to the solid electrolyte. The solid electrolyte is disposed between the anode and the cathode, such that ions flowing from the anode to the cathode travel through the solid electrolyte and electrons can flow in the opposite direction.
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