FILM GROWTH APPARATUS AND FILM GROWTH METHOD

摘要

PURPOSE: An apparatus and method for forming a film are provided to prevent a crack in a liner by removing the temperature difference of a head part. CONSTITUTION: A hollow cylindrical liner(2) partitions an inner wall and a space of a chamber. A main heater(9) heats the substrate from the lower side. A sub heater(18) is arranged between the liner and the inner wall and heats the substrate from the upper side. The main heater and the sub heater are resistive type heaters. The sub heater includes a first sub heater(18a), a second sub heater(18b), and a third sub heater(18c). The first sub heater and the main heater heat the substrate. The second heater and the third heater heat the liner with lower output than the first sub heater.