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发明名称
Apparatus for Dry Etching
摘要
<p>건식 식각 장치가 제공된다. 건식 식각 장치는 챔버, 챔버 내에 설치된 척, 척을 둘러싸는 포커스 링, 및 척의 표면의 연장면에 대하여 포커스 링의 상대적인 위치를 변경하는 변위 장치를 포함한다.</p>
申请公布号
KR101216701(B1)
申请公布日期
2012.12.31
申请号
KR20090113948
申请日期
2009.11.24
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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