| 摘要 |
<p>PURPOSE: A drawing device and a drawing method are provided to implement high drawing precision by excluding a thermal effect on a peripheral member due to unnecessary light. CONSTITUTION: An optical unit includes a spatial light modulator, a second blocking plate(232), and a cooling unit. The spatial light modulator spatially modulates light from a laser oscillator and differently reflects necessary light for drawing a pattern and unnecessary light which is not related to the pattern drawing. The second blocking plate is arranged between the substrates, passes the necessary light and blocks the unnecessary light. A diffused reflection surface(42) which diffuses and reflects incident light is formed in an object region including the incident region of the unnecessary light in the second blocking plate.</p> |
