MEASURE POWER AUTOMATIC COMPENSATION DEVICE OF SURFACE PROFILE MEASURING INSTRUMENT

摘要

PURPOSE: An automatic measuring capacity compensating device of a contact type surface shape meter is provided to measure a surface shape at high precision without transforming a measurement surface of a measurement object and to reduce the abrasion of a stylus. CONSTITUTION: An automatic measuring capacity compensating device of a contact type surface shape meter comprises a cantilever(1), a stylus(2), a displacement sensor(4), and a controller. A coil bobbin(5) is installed in a side opposite of the stylus around a rotation point of the cantilever. The coil bobbin rotates by interlocking with the cantilever to be integrated. The coil bobbin vertically moves in the inside of a magnetic field formed in the circumference of a magnetic installation plate(7) where two permanent magnetic are installed. The magnetic installation plate is fixed to a housing(8). The displacement sensor detects a rotation angle caused by height variation of the measurement object. The controller varies the strength of a current flowing in a coil depending on the rotation angle of the cantilever, thereby automatically compensating the measurement capacity of the stylus depending on an inclined surface or the height of the measurement object.