| 摘要 |
9 Abstract Method for Pulling a Silicon Single CrystalThe invention relates to a method for pulling a silicon single crystal from a melt which is contained in a crucible, comprisingimmersion of a seed crystal into the melt;crystallization of the single crystal on the seed crystal by raising the seed crystal from the melt with a crystal pull speed;widening the diameter of the single crystal to a setpoint diameter in a conical section, comprisingcontrol of the crystal pull speed in such a way as to induce a 15 curvature inversion of a growth front of the single crystal in the conical section. Fig. 1 |
