发明名称 APPARATUS FOR DELIVERING SEMICONDUCTOR COMPONENTS TO A SUBSTRATE DURING SEMICONDUCTOR PACKAGE MANUFACTURING
摘要 <p>- 10 -AbstractAPPARATUS FOR DELIVERING SEMICONDUCTOR COMPONENTS TO A SUBSTRATE DURING SEMICONDUCTOR PACKAGE MANUFACTURING 5 An apparatus 200 for delivering semiconductor components 212 to a substrate 206a; 206b; 500a;500b; 500c during semiconductor package manufacturing is disclosed. The apparatus 200 comprises a platform 216 and a plurality of delivery modules 202a, 202b affixed to the platform 216. Each of the plurality of delivery modules 202a, 202b has a support device 204a; 204b for supporting the substrate 206a; 206b; 500a; 500b; 500c, as well as a delivery device 208a; 208b for 10 delivering the semiconductor components 212 to the substrate 206a; 206b; 500a; 500b; 500c. In particular, heights of the support devices 204a, 204 are mutually levelled for conveying the substrate 206a; 206b; 500a; 500b; 500c between the plurality of delivery modules 202a, 202b.[FIG. 2]15</p>
申请公布号 SG185905(A1) 申请公布日期 2012.12.28
申请号 SG20120036273 申请日期 2012.05.17
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD 发明人 LAM KUI KAM;TANG YEN HSI;CHEUNG WAI YUEN;LAM WING KIN
分类号 主分类号
代理机构 代理人
主权项
地址