发明名称 |
APPARATUS FOR ELIMINATING WASTE GASES BY PLASMAS |
摘要 |
PURPOSE: A powder processing device using plasma is provided to chemically or thermally dissolve or reduce powder or reaction materials into stable materials using a plasma reaction device. CONSTITUTION: A reaction chamber(10) is located between a powder generating device and a vacuum pump. A microwave module(20) is connected to the reaction chamber and generates plasma in the reaction chamber. A top plate(40) is located on the upper side of the generated plasma. The top plate passes the powder and traps the generated plasma in the reaction chamber. A bottom plate(30) is located on the lower side of the generated plasma. The bottom plate traps the powder passing through the plasma and stably maintains the generated plasma. [Reference numerals] (AA) Cooling water IN; (BB) Cooling water OUT
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申请公布号 |
KR20120139951(A) |
申请公布日期 |
2012.12.28 |
申请号 |
KR20110059511 |
申请日期 |
2011.06.20 |
申请人 |
TRIPLE CORES KOREA |
发明人 |
KIM, IK NYUN;KIM, SUNG LAK;JI, YOUNG YEON |
分类号 |
H01L21/3065;H01L21/02;H01L21/205 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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