APPARATUS AND METHOD FOR PROCESSING SUBSTRATE, APPARATUS AND METHOD FOR MANUFACTURING OF SOLAR CELL USING THE SAME

摘要

PURPOSE: An apparatus and method for processing a substrate and an apparatus and method for manufacturing a solar cell using the same are provided to improve the efficiency of the solar cell by removing remaining materials in a pattern area. CONSTITUTION: A chamber includes a substrate inlet and a substrate outlet on both sidewalls thereof to move a substrate(100). The substrate includes a plurality of separation patterns(250,350). A substrate transfer unit is installed in the chamber and transfers the substrate supplied from the substrate inlet to the substrate outlet. A plasma generating unit is installed in the chamber to face the substrate transfer unit and sprays excitation gas excited by plasma generated under atmospheric pressure to the substrate.