| 摘要 |
<p>PURPOSE: A spiral coating device and a spiral coating method are provided to control a gap with high precision by controlling a vertical position of a nozzle. CONSTITUTION: A stage has a loading surface on which an object is loaded. A rotating device(3) rotates a stage in a rotation direction of the loaded surface. A coating nozzle(4) discharges materials to coat the object on the stage. A moving device(5) moves the stage and the coating nozzle along the loaded surface in a rotation axis direction cross the rotation direction. A nozzle position detecting unit detects the position information of the bottom of the coating nozzle in the rotation axis direction. A position control unit(10) controls the position of an axis direction of the coating nozzle and the loaded surface based on the position information of the coating nozzle.</p> |
