发明名称 |
METHODS AND APPARATUS TO DETERMINE PARAMETERS IN METAL-CONTAINING FILMS |
摘要 |
A method and apparatus to determine a parameter of a metal-containing film are provided herein. In some embodiments, a method of determining a parameter of a metal-containing film may include generating a first magnetic field by flowing an alternating current through a coil disposed adjacent to and spaced apart from the metal-containing film, wherein the first magnetic field induces a second magnetic field proximate the metal-containing film; heating the metal-containing film from a first temperature to a second temperature; measuring a response of the first magnetic field to the second magnetic field as the metal-containing film is heated from the first temperature to the second temperature; and correlating the response with a rate of temperature change of the metal-containing film as the metal-containing film is heated from the first temperature to the second temperature to determine a parameter of the metal-containing film. |
申请公布号 |
WO2012148906(A3) |
申请公布日期 |
2012.12.27 |
申请号 |
WO2012US34784 |
申请日期 |
2012.04.24 |
申请人 |
APPLIED MATERIALS, INC.;RAVID, ABRAHAM |
发明人 |
RAVID, ABRAHAM |
分类号 |
G01N27/72;G01N25/58 |
主分类号 |
G01N27/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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