STRUCTURE MADE OF GETTER MATERIAL HERMETICALLY PROTECTED DURING MANUFACTURING

摘要

Process for making a device comprising at least the following steps: produce a getter structure comprising at least one portion of getter material permeable to gas covered by at least one protective layer hermetic to gas; hermetic encapsulation of the getter structure in a cavity; production of at least one local opening passing through the protective layer and forming an access to the portion of getter material permeable to gas.