发明名称 MANUFACTURING METHOD AND MANUFACTURING DEVICE FOR SINGLE CRYSTAL
摘要 <P>PROBLEM TO BE SOLVED: To provide a method that obtains a single crystal with high quality and long size. <P>SOLUTION: In a crucible 1, a raw material 2 of the single crystal 9 and a seed crystal 4 are set oppositely. In the crucible 1, a guide 3 which guides a sublimated gas from the raw material 2 into the seed crystal 4 and a tantalum ring 6 comprising tantalum or tantalum carbide which encloses the surrounding of the seed crystal 4 are set. In a closed space surrounded by the inside of the crucible 1, the guide 3 and the tantalum ring 6, thermal insulation material 5 is arranged. By heating the crucible 1 of the structure described above, the single crystal 9 is developed on the seed crystal 4 by sublimating the raw material 2. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012254892(A) 申请公布日期 2012.12.27
申请号 JP20110127912 申请日期 2011.06.08
申请人 MITSUBISHI ELECTRIC CORP 发明人
分类号 C30B23/06 主分类号 C30B23/06
代理机构 代理人
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