摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray emission target and an X-ray emission device, which suppress overheat of a target, suppress output fluctuation due to a temperature rise, and have high output and stable X-ray emission characteristics. <P>SOLUTION: The X-ray emission target includes a diamond substrate, a first layer provided on the diamond substrate and containing a first metal, and a seconde layer provided on the first layer and containing a second metal which has an atomic number of 42 or more and thermal conductivity higher than that of the first metal, and a thickness of the first layer is 0.1 nm or more and 100 nm or less. <P>COPYRIGHT: (C)2013,JPO&INPIT |