| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an MEMS-based system for generating an output signal at a substantially stable frequency with which a reduced frequency drift can be achieved. <P>SOLUTION: A predetermined frequency is based on temperature dependence and at least one predetermined property. The system further includes: an excitation mechanism configured to excite the MEMS oscillator to oscillate at the predetermined frequency; and a temperature control loop configured to detect temperature of the MEMS oscillator using resistive sensing, determine whether the temperature of the MEMS oscillator is within a predetermined range of predetermined temperature on the basis of the temperature dependence and the at least one predetermined property in order to minimize frequency drift, and adjust the temperature of the MEMS oscillator so as to remain within the predetermined range. The system further includes a frequency output configured to output the predetermined frequency of the MEMS oscillator. <P>COPYRIGHT: (C)2013,JPO&INPIT |
