| 发明名称 |
MEMS MICROPHONE AND METHOD FOR MANUFACTURE |
| 摘要 |
An improved method for manufacturing an MEMS microphone with a double fixed electrode is specified which results in a microphone which likewise has improved properties. |
| 申请公布号 |
KR20120139744(A) |
申请公布日期 |
2012.12.27 |
| 申请号 |
KR20127024092 |
申请日期 |
2011.02.11 |
| 申请人 |
EPCOS AG |
发明人 |
ROMBACH PIRMIN HERMANN OTTO |
| 分类号 |
H04R19/00;H04R19/01 |
主分类号 |
H04R19/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
