| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an elastic wave device which uses plate waves and has excellent device properties. <P>SOLUTION: An elastic wave device includes: a support body; a piezoelectric substrate; and an IDT electrode 12. A cavity part 10a is provided at the support body. The piezoelectric substrate is provided on the support body so as to overlap with the cavity part 10a. The IDT electrode 12 is provided on the piezoelectric substrate so as to overlap with the cavity part 10a. In the elastic wave device, plate waves are excited by the IDT electrode 12. An end edge part of the cavity part 10a does not include a linear part extending parallel to the propagation direction of the plate waves excited by the IDT electrode 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
