发明名称 SENSOR DEVICE
摘要 A sensor device includes a substrate and a sensor chip held on the substrate. The substrate includes a flow channel. The sensor chip includes a plate. The plate includes a first surface and a second surface opposite to the first surface. A plurality of through holes each penetrates through the first surface and the second surface. A direction of a line segment connecting centers of any two adjacent through holes among the plurality of through holes is neither parallel nor perpendicular to the center line of the flow channel.
申请公布号 US2012325657(A1) 申请公布日期 2012.12.27
申请号 US201213603145 申请日期 2012.09.04
申请人 YAMAMOTO TAKEKI;NAKATANI MASAYA;USHIO HIROSHI;YAMADA YOSHIKI;NAKANO YUSUKE;PANASONIC CORPORATION 发明人 YAMAMOTO TAKEKI;NAKATANI MASAYA;USHIO HIROSHI;YAMADA YOSHIKI;NAKANO YUSUKE
分类号 G01N27/28 主分类号 G01N27/28
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