发明名称 POTENTIAL OBTAINING APPARATUS, MAGNETIC FIELD MICROSCOPE, INSPECTION APPARATUS, AND POTENTIAL OBTAINING METHOD
摘要 In a magnetic field obtaining apparatus, a measuring part (21) that is sufficiently longer than the width of an area to be measured is disposed on a measurement plane that satisfies z=α, and scanning in an X′ direction perpendicular to the longitudinal direction of the measuring part (21) is repeated while changing an angle &thetas; formed by a predetermined reference direction on the measurement plane and the longitudinal direction of the measuring part (21) to a plurality of angles. Assuming that x′ is a coordinate parameter in the X′ direction, measured values f(x′, &thetas;) obtained by repetitions of the scanning are Fourier transformed so as to obtain g(kx′, &thetas;) (where kx′ is a wavenumber in the X′ direction). Then, g(kx′, &thetas;) is substituted into a predetermined two-dimensional potential obtaining equation so as to obtain &phgr;(x, y, α) that indicates a two-dimensional potential on the measurement plane. Accordingly, it is possible to perform high-resolution two-dimensional potential measurement as a result of using the measuring part (21) that is sufficiently larger than the width of an area to be measured.
申请公布号 US2012330581(A1) 申请公布日期 2012.12.27
申请号 US201113582151 申请日期 2011.03.01
申请人 KIMURA KENJIRO 发明人 KIMURA KENJIRO
分类号 G06F19/00 主分类号 G06F19/00
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