| 发明名称 |
METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER |
| 摘要 |
In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed. Numerous other aspects are provided. |
| 申请公布号 |
US2012325328(A1) |
申请公布日期 |
2012.12.27 |
| 申请号 |
US201213605927 |
申请日期 |
2012.09.06 |
| 申请人 |
SHAH VINAY K.;ENGLHARDT ERIC;HUDGENS JEFFREY C.;ELLIOTT MARTIN;APPLIED MATERIALS, INC. |
发明人 |
SHAH VINAY K.;ENGLHARDT ERIC;HUDGENS JEFFREY C.;ELLIOTT MARTIN |
| 分类号 |
F17D3/00 |
主分类号 |
F17D3/00 |
| 代理机构 |
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