METHOD AND APPARATUS FOR MICRO-NANO PARTICLE IMPLANTING WITH LASER SHOCKWAVE INDUCTION

摘要

An apparatus for micro-nano particle implanting with laser shockwave induction comprises a laser (1), a focusing lens (2), a piece of optical glass (3), a Laval tube (4), a powder spraying system (5), a powder recycle system (7), and a nozzle (9). The laser (1) is aligned with the focusing lens (2). The optical glass (3) is mounted on the Laval tube (4) and the focal point thereof is located at the end with the larger diameter in the tube. The end with the smaller diameter of the Laval tube (4) is opened. The tube wall at the end with the larger diameter of the Laval tube (4) is provided with a local recession (41), and the powder recycle system (7) is mounted at the bottom of the local recession. The powder spraying system (5) is mounted opposite to the tube wall of the powder recycle system (7). The nozzle (9) is mounted at a 90-degree position of the tube wall, and the nozzle (9) points to the optical glass (3).