发明名称 |
AUTOMATIC CAPILLARY REPLACEMENT SYSTEM |
摘要 |
<p>An automatic capillary replacement system comprises: a base on which a clamping loader having a clamping part to clamp a capillary at an end thereof is detachably mounted; a main stage mounted on the base to horizontally reciprocate in the direction of the X-axis; a sub-stage mounted on the main stage to horizontally reciprocate in the direction of the Y-axis which crosses the X-axis; a capillary mounting unit mounted on the sub-stage to reciprocate in the direction of the Z-axis so that a used capillary is collected and mounted and a new capillary to be provided is mounted; a capillary loading unit having a capillary clamper which is movable in the direction of the X, Y and Z axes on the main stage; a clamping releasing unit which is mounted on the sub-stage and selectively releases the clamping part of the clamping loader so that a capillary can be separated and mounted; a first driving unit for reciprocating the main stage; a second driving unit for reciprocating the sub-stage; and a third driving unit for reciprocating the capillary loading unit in the direction of the Y axis.</p> |
申请公布号 |
WO2012176957(A1) |
申请公布日期 |
2012.12.27 |
申请号 |
WO2011KR07027 |
申请日期 |
2011.09.23 |
申请人 |
IL WON CO.,LTD;CHOI, YOUNG KYU |
发明人 |
CHOI, YOUNG KYU |
分类号 |
H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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