发明名称 AUTOMATIC CAPILLARY REPLACEMENT SYSTEM
摘要 <p>An automatic capillary replacement system comprises: a base on which a clamping loader having a clamping part to clamp a capillary at an end thereof is detachably mounted; a main stage mounted on the base to horizontally reciprocate in the direction of the X-axis; a sub-stage mounted on the main stage to horizontally reciprocate in the direction of the Y-axis which crosses the X-axis; a capillary mounting unit mounted on the sub-stage to reciprocate in the direction of the Z-axis so that a used capillary is collected and mounted and a new capillary to be provided is mounted; a capillary loading unit having a capillary clamper which is movable in the direction of the X, Y and Z axes on the main stage; a clamping releasing unit which is mounted on the sub-stage and selectively releases the clamping part of the clamping loader so that a capillary can be separated and mounted; a first driving unit for reciprocating the main stage; a second driving unit for reciprocating the sub-stage; and a third driving unit for reciprocating the capillary loading unit in the direction of the Y axis.</p>
申请公布号 WO2012176957(A1) 申请公布日期 2012.12.27
申请号 WO2011KR07027 申请日期 2011.09.23
申请人 IL WON CO.,LTD;CHOI, YOUNG KYU 发明人 CHOI, YOUNG KYU
分类号 H01L21/60 主分类号 H01L21/60
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