| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the degradation of an image, when an external environmental temperature and a scanner frequency change, by coinciding an optical scanning range with an electrical scanning range without adding means to detect an optical scanning position. <P>SOLUTION: The sampling clock generating device is equipped with: a PLL sine wave generation part 2 generating a position signal S2 corresponding to a synchronization signal S1 which is synchronized with vibration of a resonance scanner vibrating and simultaneously reflecting or refracting a light from a light source, and radiating the light on a sample; an absolute value processing part 7 generating an absolute value speed signal S7 by converting a speed signal S5 into an absolute value; a VCO10 generating SC with a frequency corresponding to the value of the absolute value speed signal S7; a DE generation part 16 generating a section information of an imaging section including a prescribed number of SC based on the generated SC; a second PD17 calibrating a phase of the position signal S2 so that a scanning range of the resonance scanner coincides with an imaging section range when the displacement occurs between the scanning range and the imaging section range. <P>COPYRIGHT: (C)2013,JPO&INPIT |
