ELECTRO-OPTIC MACH-ZEHNDER MODULATOR AND METHOD FOR FABRICATING AN ELECTRO-OPTIC MACH-ZEHNDER MODULATOR

摘要

The invention relates to an electro-optic Mach-Zehnder modulator, comprising - a first optical waveguide (11) forming a first arm of the Mach-Zehnder modulator (1); - a second optical waveguide (12) forming a second arm of the Mach-Zehnder modulator (1), wherein - the first and/or the second optical waveguide (11, 12) comprises a plurality of capacitive segments (111, 121) spaced apart from one another, the capacitive segments (111, 21) each forming an electrical capacitor; and - a travelling wave electrode arrangement (2) for applying a voltage across the first and/or the second optical waveguide (11, 12), the travelling wave electrode arrangement (2) comprising - a plurality of waveguide electrodes (211, 212) arranged on the capacitive segments (111, 121); - at least one electrical line (31, 32) extending at least partially along a part of the first 1 and/or the second optical waveguide (11, 12), the electrical line (31, 32) being arranged in a distance from the waveguide electrodes (211, 212); and - a plurality of connecting arrangements, wherein a connecting arrangement is as- signed to each of the waveguide electrodes (211, 212), the connecting arrangements each comprising at least two connecting structures (311, 312, 321, 322) spaced apart from one another or a single wide connecting structure (313, 323) having a width of at least 20% of the length of the assigned waveguide electrode (211, 212), wherein the width of the wide connecting structure (313, 323) and the length of the waveguide electrode (211, 212) are measured along the first and/or the second optical waveguide (11, 12), and wherein the waveguide electrodes (211, 212) each are electrically connected to the electrical line (31, 32) via the assigned two connecting structures (311, 312, 321, 322) or the assigned single wide connecting structure (313, 323), respectively. The invention also relates to a method of fabricating an electro-optic Mach-Zehnder modulator.