| 摘要 |
There is provided a facet mirror device comprising a facet element, a support device and a clamping device. The facet element comprises a first support section, while the support device comprises a second support section contacting the first support section to support the facet element. The clamping device comprises a tensioning element, a first end of the tensioning element being connected to the facet element a second end of the tensioning element being connected to a counter unit. The counter unit comprises a third support section, the support device comprising a fourth support section contacting the third support section to support the counter unit. The tensioning element, in a clamping state, is under tensile stress such that the first support section and the second support section are pressed against each other and the third support section and the fourth support section are pressed against each other in a clamping direction to clamp the facet element via a clamping force in a given position and orientation. The first support section and the second support section define at least a first axis of rotation of a relative motion between the first support section and the second support section, the first axis of rotation extending in a first plane transverse to the clamping direction. The third support section and the fourth support section define a second axis of rotation of a relative motion between the third support section and the fourth support section, the second axis of rotation extending in a second plane transverse to the clamping direction. The first axis of rotation and the second axis of rotation are located at least close to each other. |
