| 发明名称 |
Apparatus and Method for Producing Microcomponents and Use Of |
| 摘要 |
An apparatus and the use of such an apparatus and method for producing microcomponents with component structures are presented which are generated in a process chamber on a substrate according to the LIGA method for example and are stripped from the enclosing photoresist with the help of a cooled remote plasma source.
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| 申请公布号 |
US2012325264(A1) |
申请公布日期 |
2012.12.27 |
| 申请号 |
US201213599985 |
申请日期 |
2012.08.30 |
| 申请人 |
MATHUNI JOSEF;R3T GMBH RAPID REACTIVE RADICALS TECHNOLOGY |
发明人 |
MATHUNI JOSEF |
| 分类号 |
B08B7/00;B08B13/00;B81C99/00 |
主分类号 |
B08B7/00 |
| 代理机构 |
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