SYSTEM AND METHOD FOR THREE DIMENSIONAL SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method for fabricating a multi-axis sensor.

SOLUTION: A method comprises the steps of: fabricating a first die 102 having a first active surface 114 with first application electronics; fabricating a second die 104 having a second active surface 115 with second application electronics and at least one electrical connection that extends from the second application electronics to a side surface interface of the second die 104 that is adjacent to the second active surface; aligning the side surface interface to be coplanar with the first active surface; and forming at least one electrical connection between the plurality of electrical connections 119 and the first active surface.

COPYRIGHT: (C)2013,JPO&INPIT