FORMATION METHOD OF ELECTROMECHANICAL CONVERSION FILM, ELECTROMECHANICAL CONVERSION FILM, ELECTROMECHANICAL CONVERSION ELEMENT, LIQUID DISCHARGE HEAD AND IMAGE FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an electromechanical conversion film for hardly causing a crack, and an electromechanical conversion element having stable electric characteristics.

SOLUTION: A PZT precursor solution (sol-gel solution) 5 is applied to a patterned hydrophilic region 4 by an inkjet coating device, then droplets 6 of the PZT precursor solution 5 are made to hit across a coating region (the hydrophilic region 4) of a predetermined pattern region on a Pt surface on a substrate 1 and outside of the predetermined pattern region (SAM film 2: a water-repellent area). Since a contact angle outside of the predetermined pattern region is infinitely larger than that in the predetermined pattern region that is the hydrophilic region 4, a coating part outside of the predetermined pattern region of the hit sol-gel droplets 5 is sucked into the desired patten region and is levelled in the desired formation pattern. In the coating process, there is no generation of mist and individual coating defects caused by micro sol-gel droplets are not generated outside of the predetermined patten region.

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