发明名称 Particle Beam Microscope
摘要 A particle beam microscope comprises a magnetic lens 3 having an optical axis 53 and a pole piece 21. An object 5 to be examined is mounted at a point of intersection 51 between an optical axis 53 and the object plane 19. First and second X-ray detectors 33 have first and second radiation-sensitive substrates 35 arranged such that a first elevation angleβ1 between a first straight line 551 extending through the point of intersection 51 and a center of the first substrate 351 and the object plane 19 differs from a second elevation angleβ2 between a second straight line 552 extending through the point of intersection 51 and a center of the second substrate 352 and the object plane 19 by more than 14°.
申请公布号 US2012326032(A1) 申请公布日期 2012.12.27
申请号 US201213539291 申请日期 2012.06.29
申请人 BENNER GERD;MEYER STEFAN;NIEDERBERGER STEFFEN;PREIKSZAS DIRK;CARL ZEISS MICROSCOPY GMBH 发明人 BENNER GERD;MEYER STEFAN;NIEDERBERGER STEFFEN;PREIKSZAS DIRK
分类号 H01J37/285 主分类号 H01J37/285
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