SOLA CELL MANUFACTURING APPARATUS

摘要

PURPOSE: An apparatus for manufacturing a solar cell is provided to reduce the size of a chamber by installing a heater in a vertical direction of the chamber to reduce unnecessary space. CONSTITUTION: A chamber(10) receives a plurality of solar cell boards. A heater(20) is arranged between a plurality of solar cell boards and heats the solar cell board. A pair of shower heads(30) spray process gas to the plurality of solar cell boards. A plurality of exhaust ports(70a-70d) exhaust the process gas. The exhaust port is adjacent to an inlet(50) and an outlet(60).