| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stress sensor that accurately measures stress at least in two axial directions. <P>SOLUTION: A stress sensor A1 is used embedded in an object for stress measurement, and includes, in an XY plane, a pair of sensor elements 41, 42 each longitudinally extending in two separate directions different from each other, and, in a YZ plane, a pair of sensor elements 51, 52 each longitudinally extending in two separate directions different from each other. <P>COPYRIGHT: (C)2013,JPO&INPIT |
