发明名称 |
System And Method For Monitoring LED Chip Surface Roughening Process |
摘要 |
A measurement system for monitoring an LED chip surface roughening process is described. A reflective illuminator can run reflectance measurements. A vertical positioning means can adjust a distance between an objective lens and an industrial sample. A horizontal positioning means can move objects in XY plane, and is specifically configured to hold the industrial sample and a reference sample. An optical sensor can acquire images of the industrial sample. A spectrometer can acquire reflectance spectrums of the industrial sample and the reference sample. A processor can control these components. The processor can perform deskew, and calculate an average reflectance and an oscillation amplitude from the reflectance spectrums of the industrial sample.
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申请公布号 |
US2012327414(A1) |
申请公布日期 |
2012.12.27 |
申请号 |
US201213494949 |
申请日期 |
2012.06.12 |
申请人 |
XU JAMES JIANGUO;LEE KEN KINSUN;KUDINAR RUSMIN;SOETARMAN RONNY;NGUYEN HUNG PHI;HOU ZHEN;ZETA INSTRUMENTS, INC. |
发明人 |
XU JAMES JIANGUO;LEE KEN KINSUN;KUDINAR RUSMIN;SOETARMAN RONNY;NGUYEN HUNG PHI;HOU ZHEN |
分类号 |
G01J3/42;G01J3/447 |
主分类号 |
G01J3/42 |
代理机构 |
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