ACTIVE COOLING DEVICE WITH ELECTRO-STATICALLY MOVING ELECTRODE AND METHOD OF ACTIVE COOLING WITH ELECTRO-STATICALLY MOVING ELECTRODE

摘要

A device (230, 1330, 1430) includes: a first electrode (232); an electro-statically movable second electrode (234, 1734, 1834); and an electrically insulating layer (233) disposed between the first and second electrodes. The electro-statically movable second electrode is configured to have a first geometric configuration in response to a first electrical potential between the first and second electrodes, and is further configured to have a second geometric configuration in response to a second electrical potential between the first and second electrodes. The device is configured to receive a time -varying voltage and in response thereto the electrostatically movable second electrode is configured to repeatedly transition between the first geometric configuration and the second geometric configuration to influence a flow of a fluid (235) for cooling at least one heat-generating element (310).