| 摘要 |
<p>PURPOSE: A wafer aligning apparatus is provided to improve quality by preventing a wafer from being damaged in a water aligning process. CONSTITUTION: A transfer unit(100) successively transfers a wafer(30) from a cassette magazine(20) one by one. An aligning unit(200) is symmetrically arranged on both sides of the transfer unit and includes a driving unit(210), a receiving unit(220), and a rail part(230). A driving unit is formed with a cylinder structure using hydraulic or air pressure. A rolling member(224) is received in the receiving unit to align the wafer.</p> |
