| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an illumination optical system having high degree of freedom with respect to change of a polarization state. <P>SOLUTION: An illumination optical system for irradiating an irradiation target surface with light from a light source has: a spatial optical modulator which includes plural optical elements which are arranged within a predetermined plane and individually controlled, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system; and a polarization unit which is disposed in an optical path between the spatial optical modulator and the light source or a conjugation space which contains a plane optically conjugated with a predetermined plane and is disposed in the optical path to be nearer to the irradiation target plane side than the spatial optical modulator, and which has a rotatable first wavelength plate acting on a partial light flux out of a propagation light flux propagating on the optical path. <P>COPYRIGHT: (C)2013,JPO&INPIT |
