| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shower plate which can accommodate up-sizing of an MOCVD device, and can ensure manufacturing of a quality device having uniform film thickness and composition ratio, and to provide a manufacturing method therefor. <P>SOLUTION: The manufacturing method of a shower plate for use in a vapor growth device includes a step for providing a counterbore and a through hole in a first component and a second component, a step for inserting a gas discharge pipe into the counterbore of the first component, a step for inserting the other end of the gas discharge pipe, inserted into the first component, into the counterbore of the second component so as to project therefrom, a first welding step for welding the counterbore of the first component and the gas discharge pipe, a second welding step for welding the counterbore of the second component and the gas discharge pipe, and a step for welding the first component and the second component. <P>COPYRIGHT: (C)2013,JPO&INPIT |
