发明名称 MOLD FOR IMPRINTING AND PRODUCTION METHOD THEREOF
摘要 To provide an imprinting mold comprising: a flattening layer provided on a substrate, having a layer made of a flattening agent; and a layer having a fine pattern on the flattening layer.
申请公布号 US2012328728(A1) 申请公布日期 2012.12.27
申请号 US201113575854 申请日期 2011.01.27
申请人 NAKATSUKA SAKAE;AMEMIYA ISAO;KIMURA IKURU;HOYA CORPORATION 发明人 NAKATSUKA SAKAE;AMEMIYA ISAO;KIMURA IKURU
分类号 B29C33/42;B29C35/08 主分类号 B29C33/42
代理机构 代理人
主权项
地址