| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a step of determining when a terminal point of a polishing step is achieved. <P>SOLUTION: A device and a method include detection of a terminal point according to the spectrum, adjustment of a polishing speed according to the spectrum, injection of an optical head top face, or a pad 30 with a window. In detection of the terminal point according to the spectrum, a reference spectrum, in which a terminal point determination theory based on a concrete spectrum is empirically selected, is used to achieve target thickness when the terminal point is called by applying the terminal point theory based on the spectrum. A polishing terminal point is determined using a different trace or a series of sequences. An injection system creates a layer-like gas flow to the top face of an optical head 53. A vacuum nozzle and a vacuum source are constituted so that the gas flow is formed into a gas form. The window includes a flexible plastic portion, and a crystalline or glass portion. Adjustment of the polishing speed according to the spectrum includes a step of obtaining a spectrum in a different zone on a substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
