发明名称 |
METHOD OF DETERMINING MULTILAYER THIN FILM DEPOSITION ON A PIEZOELECTRIC CRYSTAL |
摘要 |
A method for accurately calculating the thickness of deposited thin film layers onto a piezoelectric crystal blank in which dissimilar materials can be utilized, enabling determinations for various applications employing exotic materials. Additionally, the specific acoustic impedance (or equivalent z-ratio) of an unknown deposited material can be determined. The exact analytical solution nearly eliminates thickness errors when several layers of different materials are sequentially deposited on the same monitor quartz crystal. |
申请公布号 |
WO2012106609(A3) |
申请公布日期 |
2012.12.27 |
申请号 |
WO2012US23793 |
申请日期 |
2012.02.03 |
申请人 |
INFICON, INC.;WAJID, ABDUL |
发明人 |
WAJID, ABDUL |
分类号 |
G01B17/02;H01L41/22 |
主分类号 |
G01B17/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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