SHEET-LIKE BEAM GENERATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sheet-like beam generating device capable of generating a sheet-like beam by using a cool electrode.

SOLUTION: A sheet-like beam generating device has: a flat plate electrode 1; ground electrodes 7; a power supply 3 applying a voltage between the flat plate electrode 1 and the ground electrode 7; a vacuum container 4 for housing the flat plate electrode 1 and the ground electrode 7; and magnetic field generating coils 6 provided outside the vacuum container 4 and generating a magnetic field for guiding a particle beam generated from the flat plate electrode 1. A particle beam generator 2 for generating the particle beam are formed on a surface of the flat plate electrode 1. The particle beam generator 2 has a substantially uniform roughness.

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