| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable a measurement object, even if it has a troubled part on a measuring route that is linear in a planar view, to be measured without being obstructed by the troubled part. <P>SOLUTION: A stylus arm (22) for use in and provided on a contour shape measuring device has styluses (30 and 32) brought into contact with the surface (H) of a measurement object (B). The device measures the surface roughness and shape of the measurement object by driving the stylus arm along one axis in a planar view and on the basis of the up-and-down movements of the styluses following the surface convexes and concaves of the measurement object. This stylus arm has a thin and long arm part (19) and first and second styluses (30 and 32) disposed at intervals in the lengthwise direction of the arm part, each stylus having a contact end enabled to come into contact with the surface of the measurement object. <P>COPYRIGHT: (C)2013,JPO&INPIT |
