| 摘要 |
In a laser processing system 400, a plurality of element patterns for creating a modulation pattern are prepared, and the modulation pattern is created from the element patterns according to a condition for forming the modified region for an object to be processed in order to form the modified region corresponding thereto. Laser light is modulated according to thus created modulation pattern, and the modified region is formed in the object by irradiation with the modulated laser light. Thus, according to the condition for forming the modified region corresponding to the object, the modulation pattern is created from the element patterns prepared beforehand.
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