发明名称 OPTICAL DEFLECTOR INCLUDING PIEZOELECTRIC SENSOR ON SUPPORT BODY
摘要 In an optical deflector including a mirror, a support body, and a piezoelectric actuator connected to the support body for rocking the mirror with respect to an axis of the mirror, at least one piezoelectric sensor is provided on the support body to sense a rocking vibration of the mirror caused by the piezoelectric actuator.
申请公布号 US2012327494(A1) 申请公布日期 2012.12.27
申请号 US201213484703 申请日期 2012.05.31
申请人 KOYAMA TAKAAKI 发明人 KOYAMA TAKAAKI
分类号 G02B26/10 主分类号 G02B26/10
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