发明名称 FILM GROWTH APPARATUS AND MANUFACTURING APPARATUS OF SOLAR CELL
摘要 <P>PROBLEM TO BE SOLVED: To solve a first and a second problems simultaneously, where the first problem is that a high temperature of 700&deg;C or higher enables crystal growth and the second problem is a manufacturing method which prevents a pn junction end face from appearing at a cutting plane even if it is cut, while, if a semiconductor pn junction is cut, it appears at a cutting plane and becomes a leak path, while a highly airtight atmospheric air cut-off mechanism is required to grow a semiconductor crystal film on a continuous substrate which is drawn out from a roll. <P>SOLUTION: To manufacture an inexpensive and robust solar cell by laminating semiconductor films on a metal substrate without using a silicon substrate. For that purpose, the first invention, which is to grow a semiconductor silicon film by making an air-tight CVD reaction chamber by holding an iron plate with a ring-shaped protrusion, was made. The second invention, which is to laminate films by separating a junction with an insulator film so as not to expose a junction end outside when cutting the iron plate, was made. According to the present invention, which is to print a coating material at high temperature, continuous manufacturing of a solar cell of crystal semiconductor on an iron plate is possible. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012256637(A) 申请公布日期 2012.12.27
申请号 JP20110127449 申请日期 2011.06.07
申请人 PHILTECH INC 发明人 FURUMURA YUJI;MURA NAOMI;NISHIHARA SHINJI
分类号 H01L21/205;C23C16/24;H01L31/04 主分类号 H01L21/205
代理机构 代理人
主权项
地址