| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a nanometal-glass particle aggregate, whereby a nanometal-glass thin film can be produced through an industrial process, provided that the nanometal-glass thin film has a large surface area, exerts a high catalytic activity and has a structural thermal stability higher than a simple amorphous particle, thereby overcoming structural disadvantages of an amorphous alloy produced through a liquid quenching method or a chemical reduction method. <P>SOLUTION: The method for producing the nanometal-glass particle aggregate comprises intermittently turning on and off an RF power source while plasma is in an unstable state immediately after RF voltage application in a vacuumed, gas-replaced RF magnetron sputtering apparatus. Here, gas used for the gas replacement is argon gas, and the RF power source is intermittently turned on and off at an interval of ≥3 and ≤10 min. <P>COPYRIGHT: (C)2013,JPO&INPIT |
