摘要 |
An exemplary device includes first and second portions that are movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region. When the overlap region is compressed, displacement of the first and second portions relative to each other is prevented so as to provide relatively high stiffness in first and second orthogonal directions (e.g., z- and y-directions) and relatively low stiffness in a third orthogonal direction (e.g., x-direction). The device can be used in coordination with an actuator, wherein operation of the actuator and compression of the overlap region are automated. |
申请人 |
NIKON CORPORATION;WATSON, DOUGLAS, C.;HASHEMI, FARDAD;MARGESON, CHRISTOPHER, S. |
发明人 |
WATSON, DOUGLAS, C.;HASHEMI, FARDAD;MARGESON, CHRISTOPHER, S. |