STAMP FOR IMPRINT LITHOGRAPHY AND METHOD OF FABRICATING THE STAMP

摘要

PURPOSE: A stamp for imprint lithography and manufacturing method thereof are provided to prevent a stamp resist from being torn as users lift the stamp resist from a master template with holding a flange. CONSTITUTION: A method for manufacturing a stamp for imprint lithography comprises following steps. A stamp resist(300) is applied on the side of a master template(200) which has patterns. First and second molds are placed when the applied stamp resist is hardened. An insert(510) is placed between the first and second molds. The stamp resist is additionally applied between first and second molds. The first and second molds are separated after the stamp resist is hardened. The stamp resist applied between the first and second molds is hardened with the insert, and a flange(500) is formed. Workers lift up the flange, and separate the stamp resist from the master template.